Files

• .gitignore
• Changes
• LICENSE
• MANIFEST
• MANIFEST.SKIP
• META.json
• META.yml
• Makefile.PL
• README.md
• cpanfile
• examples/etch_aluminum_silicide.pl
• examples/etch_chamber_geometry.pl
• examples/etch_copper.pl
• examples/etch_gdsii_simulation.pl
• examples/etch_loading_effect.pl
• examples/etch_photoresist_ash.pl
• examples/etch_photoresist_strip.pl
• examples/etch_polyimide.pl
• examples/etch_silicon_nitride.pl
• examples/etch_tantalum.pl
• examples/etch_titanium.pl
• examples/make_sample_mask.pl
• examples/sample_mask.gds
• lib/Physics/Etch.pm
• lib/Physics/Etch/Chamber.pm
• lib/Physics/Etch/DryEtch.pm
• lib/Physics/Etch/Etchant.pm
• lib/Physics/Etch/GDSII.pm
• lib/Physics/Etch/Layout.pm
• lib/Physics/Etch/Loading.pm
• lib/Physics/Etch/Material.pm
• lib/Physics/Etch/Process.pm
• lib/Physics/Etch/Simulation.pm
• lib/Physics/Etch/WetEtch.pm
• t/00-load.t
• t/10-wet.t
• t/20-dry.t
• t/30-facade.t
• t/40-gdsii.t
• t/50-layout.t
• t/60-chamber.t
• t/70-loading.t
• t/80-simulation.t